Plasma Technology

Case Studies

Your Partner for Driving Innovation

Collaborating closely with our customers remains our core purpose and it is vital to continue supporting them in their research and development journey. In the case studies, you will find more details about our customers’ innovative projects and how they use Oxford Instruments’ systems for device fabrication across various industries, including quantum, photonics & lasers, 2D materials, MEMS, sensors, power devices and more.

University of Twente

Using a range of systems such as DRIE, PECVD and IBE to develop a microsensor to measure the calorific value of natural gas by combustion.

Learn More >

University of Glasgow

Optimising dry etch recipes to produce high coherence qubit devices for the fabrication of superconducting circuits.

Learn More >

Eindhoven University of Technology

Using advanced plasma ALD technology to achieve conformal deposition on high aspect ratio features, control over film properties and selective area growth.

Learn More >

University College London

Using RIE to etch NbN films for superconducting circuits and to create smooth sidewalls between a pair of waveguides for chip‑based optical buffers.

Learn More >

Our Customers' Published Research

Our customers' research has a huge contribution towards technological advancements in various industries. Thus, we are proud to present their work to our Publications database, in which you will find innovative research projects related to optoelectronics, semiconductors, discretes, MEMS, quantum and advanced materials.

Find out More

Website by Miramar Communications Ltd