Part of the Oxford Instruments Group
Download our NEW Quantum Brochure

Wafer processing solutions for Quantum Information Processing and Quantum Sensing Devices

Oxford Instruments Plasma Technology has a deep understanding of
how plasma process solutions can be used to optimise the features needed for Quantum technologies. Download our NEW Quantum technologies brochure to find out more about our wafer processing solutions.

We specialise in tailored processing solutions for both quantum information processing and quantum sensing. These include leading
edge processes such as: deep Si etching in the PlasmaPro100 Estrelas, metal, diamond and compound semiconductor etch in the PlasmaPro100 Cobra and ALD of superconducting nitrides in the FlexAL. Download the brochure to continue reading.


If at any point we could help you investigate our Quantum solutions further, please get in touch to find your local sales representative.

Get in Touch