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NOVEMBER 12 2019
OXFORD IN YOUR CITY, DALLAS, TX

NOVEMBER 12
9AM-4PM, THE STAR IN FRISCO

HEAR THE LATEST INSIGHTS ON LOW DAMAGE PLASMA ETCH & DEPOSITION SOLUTIONS FOR DEVICE MANUFACTURING - FROM THE COMFORT OF THE DALLAS COWBOYS WORLD HEADQUARTERS! 

REGISTER TODAY FOR A 1ST CLASS SEAT AT A WORLD CLASS VENUE WITH THE BEST-IN-CLASS COMPOUND SEMI EXPERTS.

SiC | VCSEL | GaN | ALE | ALD | InP

Oxford In Your City Learn with a view REGISTER NOW

TALK TITLES

Atomic Layer Etching
A new technique for ultra precise and low damage etching

SiC Power Devices
Achieving smooth, low defect density substrates and optimum UMOSFET trenches by plasma etching

InP Laser Manufacturing
Ensuring the facet is smooth and vertical

VCSEL Device Manufacturing
Low footing process for maximum device performance

ALD for GaN Power Devices
Fast, plasma-enhanced ALD enabling improved interfaces, high quality films and high throughput

Ion Beam Etching and Deposition
Laser Facet Processing by Ion Beam Sputtering

ALD

ALD

GaN

GaN

InP

InP

SiC

SiC

SiC

SiC

VCSEL Mesa

VCSEL

MEET THE PRESENTERS

Dr Mark Dineen

DR MARK DINEEN

Experienced Technical Marketing Manager with a demonstrated history of communicating complex technical ideas and scientific concepts to a varied audience for etch and deposition. These include ALD, ALE, CVD, ICP, PECVD and RIE.

InP Laser Manufacturing, Dr Ligang Deng

DR LIGANG DENG

Principal Process Engineer, focussing on dry etch processes for III-V materials and Failure analysis as well as developing etch processes for other materials such as Cu, polymer, oxides and nitrides.

VCSEL Device Manufacturing, Stephanie Baclet

STEPHANIE BACLET

She works closely with optoelectronics device manufacturers to translate requirements
of their device characteristics into nanofabrication requirements for plasma processing products.

Dr Aileen O'Mahony

DR AILEEN O'MAHONY

Atomic Scale Processing Product Manager at Oxford Instruments. Aileen has worked in the US and UK on industry-driven process development for the commercialisation of ALD-functionalised products.

Pauline Alvarez

PAULINE ALVAREZ

Ion Beam Specialist at Oxford Instruments. Pauline is an experienced thin film processing expert with a specialisation in Ion Beam techniques for manufacturing of optoelectronic devices like lasers and IR sensors.

REGISTER NOW