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Part of the Oxford Instruments Group
Moving engineered parts such as chamber, loadlock and turbo pumps are subjected to intense wear and tear during system processes, meaning they will inevitably require replacement at some point in time. Chamber, loadlock, and turbo pumps are also frequently declared obsolete by manufacturers, as new design innovations, often involving greater efficiency and less energy usage, are introduced.
Where available, Oxford Instruments Plasma Technology aims to supply the most recent generation of pumps, meaning your system benefits from the latest leading-edge design innovations.
We supply a range of chamber, loadlock, and turbo pumps from leading manufacturers. The following features and benefits are shown as an example only:
Edwards STP451C
Pfeiffer Adixen ATH1600MT
Pfeiffer Adixen ATH500MT
Pfeiffer Hi Pace 80
Chamber, loadlock, and turbo pump upgrades are typically installed within just one day.
Chamber, loadlock, and turbo pump upgrades are available for the full range of Oxford Instruments Plasma Technology platforms.
Please contact your local customer service sales team for more information, pricing, and a free consultation.
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