Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
Sustainability Investors Careers News Events Contact
Investors Careers
  1. Home
  2. Products
  3. PECVD

PECVD Systems

The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.

Products

The PlasmaPro 100 PECVD system is specifically designed to produce high quality films with excellent uniformity and control of film properties such as refractive index, stress, electrical…

PlasmaPro 100 PECVD

Find out more

The PlasmaPro 800 offers a flexible solution for Plasma Enhanced Chemical Vapour Deposition (PECVD) processes on large wafer batches and 300mm wafers, in a compact footprint, open-loading…

PlasmaPro 800 PECVD

Find out more

The PlasmaPro 80 is a compact, small footprint system offering versatile etch and deposition solutions with convenient open loading. It is easy to site and easy to use, with no compromise…

PlasmaPro 80 PECVD

Find out more

© Oxford Instruments 2024

Website by Miramar Communications Ltd