Part of the Oxford Instruments Group
Expand
Plasma Technology

Process Solutions

Process Solutions

With experience and expertise in supplying device process solutions to the global production market, we have developed one of the strongest libraries of processes and capabilities in the world.

With Oxford Instruments Plasma Technology’s Process solutions, you secure direct access to a team of applications experts and an extensive recipe library, comprising more than 8,000 recipes across multiple platforms. Sharing this knowledge is instrumental in helping you deliver the advanced, stable solutions required to maximise device performance.

Oxford Instruments Plasma Technology Process Solutions
REQUEST A QUOTE

Process Solutions Options

Process Support Agreement

Support for any new process requirements not included in your original Process Acceptance (PA) specification.

Process Care Agreement

Support for processes included in your original Process Acceptance (PA) specification.

Time and Materials Process Support

An informal option tailored to your specific requirements.

Process Solutions Options at point-of-sale

Process Support Agreement

Process Care Agreement

Time and Materials Process Support

Agreement Duration

12-36 months

Suitability

For customers seeking support on any new process requirements not included in your original Process Acceptance (PA)

For customers seeking support on processes included in your original Process Acceptance (PA)

For customers seeking process support for developing a process without the need for a formal agreement. As an example, this might include troubleshooting process issues and starting points for recipes from within the Oxford Instruments Plasma Technology process library

Technical Help Desk

Normal office hours GMT 08:00 to 17:00 Monday-Friday

Application Engineer Support

  • Response time typically within 24 hours
  • Recipes supplied securely via email or online download
  • Dedicated access to the Applications Engineer
  • Support managed by local applications team
  • Initially remote support via TeamViewer
  • Laboratory-based development work is excluded
  • Up to 4 additional starting point recipes can be selected
  • Response time typically within 48 hours
  • Solutions supplied securely via email or online download
  • Support managed by local applications team
  • Initially remote support via TeamViewer
  • Laboratory-based development work is excluded

Process Solutions Options for after-sales 

Process Support Agreement

Process Care Agreement

Time and Materials Process Support

Agreement Duration

12-36 months

3 months from date of Purchase Order

Suitability

For customers seeking support on any new process requirements not included in your original Process Acceptance (PA)

For customers seeking support on processes included in your original Process Acceptance (PA)

For customers seeking process support for developing a process without the need for a formal agreement. As an example, this might include troubleshooting process issues and starting points for recipes from within the Oxford Instruments Plasma Technology process library

Technical Help Desk

Normal office hours GMT 08:00 to 17:00 Monday-Friday

Application Engineer Support

  • Response time typically within 24 hours
  • Recipes supplied securely via email or online download
  • Dedicated access to OIPT Applications Engineer
  • Support managed by local applications team
  • Initially remote support via TeamViewer
  • Laboratory-based development work is excluded
  • Response time typically within 48 hours
  • Solutions supplied securely via email or online download
  • Support managed by local applications team
  • Initially remote support via TeamViewer
  • Laboratory-based development work is excluded

The Benefits

We have developed effective Process Solutions from decades of experience in wafer processing, process steps and recipes.

Processing experience has allowed us to understand how individual process steps and timings contribute to yield and the quality and performance of manufactured devices, as well as how minor adjustments to steps and timings can help optimise processes. We aim to harness the value of this experience and share with you some of the expertise our rich heritage has presented.

You secure expert support and guidance from a trusted partner in process stability. Collaborating with experts also means you avoid wasting valuable production time, with solutions typically delivered within 24 hours.

You also get peace of mind, whether you’re seeking to expand production capabilities with new recipes/steps or overcome challenges in an existing process with expert problem-solving.

Process Solutions - Oxford Instruments Plasma Technology
Process Solutions - knowledge and capabilities

Expand knowledge and capabilities

Process Solutions - recipe library

Access to our recipe library

Process Solutions - applications experts

Access to a team of applications experts

Process Solutions - support and guidance

Support and guidance in all recipes

REQUEST A QUOTE

Credentials

Oxford Instruments is in the business of science. Our products and services are enabled by science, developed by scientists, and used in laboratories all over the world. Knowledge in numbers:

years in the market as Oxford Instruments Plasma Technology

experts with graduate and post-graduate degrees (63 Bachelors, 22 Masters, 23 PhD)

years of group experience in plasma physics

recipes in our library and across multiple Oxford Instruments systems

Oxford Instruments Plasma Technology team

Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

  • Remote diagnostics software provides quick & easy fault diagnosis & resolution
  • Support agreements are available to suit the budget and situation
  • Global spares in strategic locations for quick response
  • Global service engineers provide preventative maintenance service & support
  • A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available

Related content

More from Service & Support

Find Support Near You