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Upgrades
Dual CM Gauge Switching

Upgrade for increased process flexibility

Upgrade provides the ability to utilise two differing ranges of capacitance manometer via a single pressure control valve and automatically switch gauge use dependant on pressure. 

Benefits

  • Greater pressure control range
  • Maintains resolution
  • Single pressure set point on front end GUI
  • Flexible gauge configuration
  • Increased heat transfer efficiency for ICPCVD processes
  • Increased process flexibility
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