Part of the Oxford Instruments Group
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Single load lock systems

Our single load lock process modules offer a 200mm platform with single wafer and multi-wafer batch capability.
The process modules offer excellent uniformity, high throughput and high precision processes. Our tools are well proven, with over 90% uptime and processes that are guaranteed to ensure rapid start-up during installation.

Without Helium backside cooling

Without Helium backside cooling

With Helium backside cooling

With Helium backside cooling

Available products