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Open load systems

Our open load process modules offer up to 450mm platforms with single wafer and multi-wafer batch capability.
The process modules offer excellent uniformity, high throughput and precision processes.

Request more information

Available products

PlasmaPro 80 ICP RIE
PlasmaPro 80 ICPCVD
PlasmaPro 80 PECVD
PlasmaPro 80 RIE
PlasmaPro 800 PECVD
PlasmaPro 800 RIE

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