Part of the Oxford Instruments Group
Expand
Collapse
Oxford Instruments
Applications
Products
News
Events
Contact
Sustainability
Investors
Careers
News
Events
Contact
en
en
Investors
Careers
About Us
New Facility
Our Facility
News
Events
Solutions for Production
Solutions for Research
Sustainability
Applications
2D Materials
Augmented Reality
Biomedical Devices
Failure Analysis
HBLEDs
MEMS & Sensors
Infrared Sensors
Lasers
MicroLEDs
Power Devices
Quantum Technology
RF Devices
VCSELs
Technologies
Plasma Etching
Reactive Ion Etching
RIE-PE
ICP RIE Etching
Deep Reactive Ion Etching
Plasma Polish Dry Etch
Ion Beam
Ion Beam Deposition
Ion Beam Etching
Plasma deposition
PECVD
ICPCVD
CVD
Atomic scale
Atomic Layer Deposition
Atomic Layer Etching
Atomic Scale Processing
Products
ICP RIE Etch
PlasmaPro 80 ICP
PlasmaPro 100 Cobra ICP
PlasmaPro 100 Cobra GaAs VCSEL
RIE
PlasmaPro 80 RIE
PlasmaPro 100 RIE
PlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas DSiE
PECVD
PlasmaPro 80 PECVD
PlasmaPro 100 PECVD
PlasmaPro 800 PECVD
ICPCVD
PlasmaPro 100 ICPCVD
CVD
PlasmaPro 100 Nano CVD
ALD
Atomfab ALD
PlasmaPro ASP
FlexAL ALD
ALE
PlasmaPro 100 ALE
PlasmaPro 100 ALE and Etchpoint
Ion Beam
Ionfab IBE
Ionfab IBD
Software
PTIQ Software
SECS/GEM Software
Library
Library
Blog
Process News
Videos
Webinars
White Papers
Case Studies
Customer Gallery
Customer Publications
Semi Interface Magazine
Semi Interface Autumn 2025
Semi Interface Summer 2025
Semi Interface Spring 2025
Semi Interface Autumn 2024
Support
Service Support
Service Support Packages
Process Solutions
Remote Support
Upgrades & Software
PTIQ Software
Spares
Service Blog & FAQs
Technical Training Courses
Level 1 (Introductory) Courses
Level 2 (Intermediate) Courses
Level 3 (Advanced) Courses
Specialist Modules
Contact Us
Shop
UK
Europe
US & Canada
Asia
Japan
News
Events
Contact
eCommerce
Service
Forensics
Quantum Technology
Semiconductors
Energy Generation & Storage
Bioimaging & Life Science
Service Labs & Core Facilities
Pharmaceuticals
Microparticle Analysis
Chemical Imaging
2D Materials
Agriculture & Food
Polymers
Structural Materials: R&D
Optoelectronics
Geology, Petrology and Mining
Additive Manufacturing
Transmission Electron Microscopy (TEM)
Structural Materials: QC & FA
Batteries & Fuel Cells
Electronics & Semiconductor Packaging
Chemical & Catalysis
Metal & Allay
Automotive
Aerospace
New Energy
Power Devices
Microelectronics
Ceramics
Environmental Science
Medicine
Steel
Augmented Reality
MEMS & Biomedical
No results
2025-10-08 13:27:05
Open in a new tab
Part of the Oxford Instruments Group
