Part of the Oxford Instruments Group
RIE and ALE Processes for Quantum Devices

2 December 2021 at 4PM (GMT)

About the Webinar

Plasma-based Reactive Ion Etch and Atomic Layer Etch processes are critical for the fabrication of quantum devices of all kinds. Dr Russ Renzas will describe processes for established and emerging materials used to make a wide range of quantum devices including superconducting qubits, quantum photonic elements, and diamond-based quantum sensors. These devices require highly controlled, stable processes that will not damage the surface and leave no residues.

This webinar will give an introduction of:

  • The various etch platforms that are available and their differences
  • How each etch system can be used to overcome some of the processing roadblocks
  • Quantum-specific examples of what can be done and why it should be done during device fabrication process


Meet the Presenter

Dr Russ Renzas

Dr Russ Renzas

Quantum Technologies Market Manager, Oxford Instruments Plasma Technology

Russ specializes in Quantum Technology with the Plasma Technology group at Oxford Instruments. He facilitates collaborations that leverage Oxford Instruments’ process expertise to help our partners carry out world-class research.

Russ’s experience includes directing device fabrication at Rigetti Computing, a superconducting quantum computing start-up, as well as leading metrology, failure analysis, and fundamental understanding at a silver nanowire start-up. He also has experience as a deal lead for the Princeton Alumni Angels and has co-authored over 15 peer-reviewed journal articles with nearly 3000 citations. Russ has a B.S.E. in Electrical Engineering from Princeton University and earned his Ph.D. in Physical Chemistry at UC Berkeley. Russ is currently based in Reno, Nevada, where he is also Adjunct Faculty at the University of Nevada, Reno.



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