Part of the Oxford Instruments Group
Wide temperature range electrode upgrade

Expand the capability of your tool -New processes possible by the addition of different gases*

Up to 4 lines can be added with an internal gas pod

This means that even if your external gas pod is at full capacity, you can add further gases to your tools and enable a broader range of processes or MFC flow ranges.

Features & benefits

  • Up to 4 extra gas lines
  • Additional to external gas pod lines
  • Compact installation
  • Extra processes
  • Broader MFC flow ranges
  • Extra capacity

*Non-toxic gases only

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Related Support

Our repairs and exchange services are particularly beneficial for electrical and electronic modules and high value components