A new and innovative upgrade is now available for the PlasmaPro 100 RIE and PlasmaPro 100 ICP systems with a wide-temperature range electrode.
This upgrade offers an important range of valuable benefits, including enhanced productivity solutions and reduced ownership costs. Several options are available for this upgrade, depending on your specific functionality and performance requirements. Please contact us for more information about the options and pricing.
The graph is showing CDA Cooling from +260°C to +30°C.
The Rapid Cooling and CDA Electrode Temperature Control upgrade offers:
The graph is showing table temperature maintained at 150°C to +/-1°C for approximately 60 mins.