HIDEN HMT RGA UPGRADE

• HMT mode for high-pressure operation to 4 x 10-3 mbar (3 m Torr)
• RGA mode for high sensitivity operation to 10-13 mbar (7.5 x 10-14 Torr)
• 100 amu mass range
• Stability better than +/- 1% over 24 hours
• Fast access mixed mode scanning
• Real time background subtraction
• Dedicated Win 7 PC provided to allow real-time process monitoring

Benefits:

• Increase reproducibility by monitoring cleanliness fingerprints and measuring contamination
• Measure ratios of process gasses and compare with MFCs to increase accuracy
• Gain insights into the chemistry by looking at volatile products from surface reactions

This is an excellent tool for:

• Bakeout cycles
• Monitoring pump performance
• Leak detection
• Virtual leaks / desorption
• Outgassing studies