Key Features:
- HMT mode for high-pressure operation to 4 x 10-3 mbar (3 m Torr)
- RGA mode for high sensitivity operation to 10-13 mbar (7.5 x 10-14 Torr)
- 100 amu mass range
- Stability better than +/- 1% over 24 hours
- Fast access mixed mode scanning
- Real time background subtraction
- Dedicated Win 7 PC provided to allow real-time process monitoring
Benefits:
- Increase reproducibility by monitoring cleanliness fingerprints and measuring contamination
- Measure ratios of process gasses and compare with MFCs to increase accuracy
- Gain insights into the chemistry by looking at volatile products from surface reactions
This is an excellent tool for:
- Bakeout cycles
- Monitoring pump performance
- Leak detection
- Virtual leaks / desorption
- Outgassing studies
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