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UPGRADES
HIDEN HMT RGA

HIDEN HMT RGA UPGRADE

Key Features:

  • HMT mode for high-pressure operation to 4 x 10-3 mbar (3 m Torr)
  • RGA mode for high sensitivity operation to 10-13 mbar (7.5 x 10-14 Torr)
  • 100 amu mass range
  • Stability better than +/- 1% over 24 hours
  • Fast access mixed mode scanning
  • Real time background subtraction
  • Dedicated Win 7 PC provided to allow real-time process monitoring

Benefits:

  • Increase reproducibility by monitoring cleanliness fingerprints and measuring contamination
  • Measure ratios of process gasses and compare with MFCs to increase accuracy
  • Gain insights into the chemistry by looking at volatile products from surface reactions

This is an excellent tool for:

  • Bakeout cycles
  • Monitoring pump performance
  • Leak detection
  • Virtual leaks / desorption
  • Outgassing studies
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