BARCODE READER SOFTWARE FOR PLASMA SYSTEMS
Track your wafers accurately through your facility.
- Fast and accurate recording of wafer details
- Totally eliminates user error when tracking wafer lots.
- Customisable software to match your barcode requirements
- Enable the equipment to be incorporated into your barcode scheme
- Automated recipe selection
- Accurate and fast wafer lot activity
- Data is available quickly, access where your wafers are immediately
Integration features
- Allows operators to enter batch/lot and recipe information using a barcode scanner instead of requiring keyboard entry
- Reduces operator errors when entering batch/lot and recipe information and to facilitate integration with factory automation systems
- Increases operator throughput when entering information into system
- Reduces operator error rate
- Available on all PC200/PC4500 Systems
- Not available on PC3000/PC3500 systems
- Enter Information required for individual batch using barcode scanner
- Enter Batch Name, Lot Name, Recipe Name, Wafers names depending on customer requirements and tool type
Part of the Oxford Instruments Group
