BARCODE READER SOFTWARE FOR PLASMA SYSTEMS

• Fast and accurate recording of wafer details
• Totally eliminates user error when tracking wafer lots.
• Customisable software to match your barcode requirements
• Enable the equipment to be incorporated into your barcode scheme
• Automated recipe selection
• Accurate and fast wafer lot activity
• Data is available quickly, access where your wafers are immediately
  
  

Integration features

• Allows operators to enter batch/lot and recipe information using a barcode scanner instead of requiring keyboard entry
• Reduces operator errors when entering batch/lot and recipe information and to facilitate integration with factory automation systems
• Increases operator throughput when entering information into system
• Reduces operator error rate
• Available on all PC200/PC4500 Systems
• Not available on PC3000/PC3500 systems
• Enter Information required for individual batch using barcode scanner
• Enter Batch Name, Lot Name, Recipe Name, Wafers names depending on customer requirements and tool type