Part of the Oxford Instruments Group
Training Courses

Professional Training

We offer a comprehensive range of intermediate and advanced level maintenance courses for all of our major product lines.

The course content is tailored to the needs and experience of those attending, based on a training needs analysis conducted prior to the course agenda being assembled.

The courses are held either at our UK headquarters or at your premises, utilising your own Oxford Instruments systems.

Key Benefits of Training

Provide new and existing users with the knowledge required to undertake basic maintenance and fault diagnosis maximising system uptime and increasing self-sufficiency.

Assists news users to rapidly come up to speed on the correct use of the tool software, minimising the risk to the equipment



Equipment Training

Essential Training

Examine and explore, in detail, the various hardware blocks, software diagnostic options and electrical schematics of your system. We offer Equipment Training for all Plasma and Ion Beam Systems. 

You'll learn:

  • Benchmark tool performance prior to maintenance
  • How to carry out essential skills, such as returning of the AMU
  • How to recognise and isolate hardware issues using service mode
  • Appreciate the interlock scheme and interpreting alarm signals appropriately

New User Training

For new members of your team or those unfamiliar with system software.

You'll learn:

  • How to operate system software in a risk-free environment
  • Skills such as recipe writing and retrieving wafers manually using service mode
  • Understanding and responding appropriately to system alerts

The course can be adapted to suit the background, experience and needs of those attending.


Advanced Training

For those looking to become self-sufficient to maintain their own Plasma or Ion Beam systems and intend to bring yearly preventative maintenance in-house. This course provides comprehensive instruction for maintenance and equipment engineers.

You'll learn:

  • How to benchmark system performance
  • How to disassemble, clean and maintain the system with step-by-step instruction
  • Essential skills (taught in a practical environment)

Included in the training are a full suite of training presentations on system operation, hardware and schematics, and a PM kit for the system.

PlasmaPro Cobra

Maintenance Training

This training is available for all our PlasmaPro systems and for Ionfab, the Ion beam system. You will explore the various system hardware and mechanical assemblies in a risk-free environment.

You will learn:

  • How to benchmark tool performance
  • Disassembly and rebuild of ion source, neutraliser and grids for Ion Beam Platforms.
  • Disassembly and rebuild of electrode and source for Plasma Platforms.
  • Main hardware blocks and internal electrical structure
  • Theoretical units on the interlock scheme, PLC and RF
  • Learn how to utilise Logviewer and diagnostic viewer to identify faulty hardware
  • Full review of sample holder
  • Practice diagnostic skills with a range of pre-set fault scenarios

Additional Training

ALD Training

Examine and explore, in detail, various hardware blocks, software diagnostic options and electrical schematics of your system. Some classroom units are included.

You'll learn:

  • Essential on-tool skills for equipment and maintenance engineers
  • How to identify and rectify hardware issues from commonly-occurring symptoms

Process Training

Process engineers looking to develop the essential skills required to better understand the various processes including process optimisation and analysis.

You'll learn:

  • Introduction to Process (general or specific to requirements)
  • Process setup and Optimisation (including process trends)
  • Process measurements and analysis techniques
  • Endpoint training (optional)
  • Chamber cleaning (Plasma and mechanical cleaning)
  • LogViewer for identifying system health trends
  • Process troubleshooting

Handler Training

Held at our Plasma Technology Headquarters, you'll look at the Brooks MMX, Hine or EMS platforms. This course is ideal for maintenance and equipment engineers.

You'll learn:

  • How to rectify wafer placement errors and reset the handling using the hand pendant
  • Basics setup routines
  • Wafer size changes
  • Elevator configuration and set up

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