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Titanium Dioxide

Titanium Dioxide (TiO2) has a refractive index of 2.488, 2.583 or 2.609 for the bulk material depending on which form. It can be used in optical coatings for mirrors or filters. Furthermore, TiO2 can have a high dielectric constant, can be used as biocompatible material, as a corrosion-resistant layer and can have photocatalytic properties.

TiN may be deposited using Atomic Layer Deposition (ALD) or Ion Beam Deposition (IBD) and etched using Inductively Coupled Plasma (ICP).

Titanium Dioxide
  • Highly anisotropic profile.
  • Small area slanted etch also possible.
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  • High material quality and low damage, even at low deposition temperature.
  • Additionally, when using the substrate biasing option on the FlexAL the properties can be tuned.
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