Titanium Dioxide

Titanium Dioxide (TiO2) has a refractive index of 2.488, 2.583 or 2.609 for the bulk material depending on which form. It can be used in optical coatings for mirrors or filters. Furthermore, TiO2 can have a high dielectric constant, can be used as biocompatible material, as a corrosion-resistant layer and can have photocatalytic properties.

TiN may be deposited using Atomic Layer Deposition (ALD) or Ion Beam Deposition (IBD) and etched using Inductively Coupled Plasma (ICP).