Titanium Dioxide

Titanium Dioxide (TiO2) has a refractive index of 2.488, 2.583 or 2.609 for the bulk material depending on which form. It can be used in optical coatings for mirrors or filters. Furthermore, TiO2 can have a high dielectric constant, can be used as biocompatible material, as a corrosion-resistant layer and can have photocatalytic properties.

TiN may be deposited using Atomic Layer Deposition (ALD) or Ion Beam Deposition (IBD) and etched using Inductively Coupled Plasma (ICP).

Titanium Dioxide

Highly anisotropic profile.
Small area slanted etch also possible.

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High material quality and low damage, even at low deposition temperature.
Additionally, when using the substrate biasing option on the FlexAL the properties can be tuned.

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