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  2. Processes
  3. PI

Polyimide

Polyimide (PI) is a polymer of imide monomers. PI may be dry-etched using Inductively Coupled Plasma (ICP) etching and Reactive Ion Etching (RIE).

Polyimide
More on ICP Request more information
More on RIE Request more information

Related Products

PlasmaPro 100 RIE
PlasmaPro 100 Cobra ICP Etch

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