Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
InvestorsCareersNewsEventsContacteCommerce
Investors Careers
About Us
Our FacilityNewsEventsSolutions for ProductionSolutions for Research
Introducing Atomfab
Markets
2D MaterialsAugmented RealityBiomedical DevicesFailure Analysis
HBLEDsInfrared SensorsLasersVCSELs
MEMS & SensorsPower DevicesQuantum TechnologyRF Devices
Introducing Atomfab
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP Etching
Ion Beam
IBDIBE
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Introducing Atomfab
Processes
1D materials2D materialsAl2O3AlGaN-GaNAlNa-SiCrCo
DiamondDLCGaSbGaAs/AlGaAsGaNGaPHfNHfO2
InP/InGaAs/InAlAsInSbNbNNiPMMAPtSiSiC
SiGeSiNxSiO2Ta2O5TiO2VOxZnOMore materials...
Products
ICPPlasmaPro 80 ICPPlasmaPro 100 CobraPlasmaPro 100 PolarisRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDPlasmaPro 1000 StratumICPCVDPlasmaPro 80 ICPCVDPlasmaPro 100 ICPCVD
ALDAtomfabFlexAL
ALE
PlasmaPro 100 ALE
Ion Beam
Ionfab 300 IBEIonfab 300 IBD
Nanoscale Growth
PlasmaPro 100 Nano
Introducing Atomfab
Library
BlogProcess NewsVideosWebinarsWhite PapersCustomer Gallery
Introducing Atomfab
Support
Service & Support
Support ContractsUpgrades & SoftwareSparesTrainingTeamviewerWarranty Options
Raise a Support Ticket
Contact Us
Contact Us
News
Events
Contact
eCommerce
  1. Home
  2. Processes
  3. LiNbO3

Lithium Niobate

Lithium Niobate (LiNbO3) is used in Surface Acoustic Wave (SAW) and related devices used in the communications industry. LiNbO3 and it's related films may be dry-etched using the Inductively Coupled Plasma (ICP) process.

More on ICP Request more information

Related Products

PlasmaPro 100 Cobra
PlasmaPro 80 ICP

© Oxford Instruments 2020

Website by Miramar Communications Ltd