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  1. Home
  2. Processes
  3. LiNbO3

Lithium Niobate

Lithium Niobate (LiNbO3) is used in Surface Acoustic Wave (SAW) and related devices used in the communications industry. LiNbO3 and its related films may be dry-etched using the Inductively Coupled Plasma (ICP) process.

More on ICP Request more information
LiNbO3

Related Products

PlasmaPro 100 Cobra
PlasmaPro 80 ICP

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