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Lithium Niobate

Lithium Niobate (LiNbO3) is used in Surface Acoustic Wave (SAW) and related devices used in the communications industry. LiNbO3 and its related films may be dry-etched using the Inductively Coupled Plasma (ICP) process.

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LiNbO3

Related Products

PlasmaPro 100 Cobra ICP RIE Etch
PlasmaPro 80 ICP RIE

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