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Indium Tin Oxide (ITO)

Indium Tin Oxide (ITO) is used in many applications as a Transparent Conductive Oxide (TCO). Device examples are: solar cells, touch panel contact and electrodes for LCD screens. It may be dry etched using Reactive Ion Etching (RIE) or Inductively Coupled Plasma Etching (ICP) and can be sputtered using Ion Beam Deposition (IBD).


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ITO may be deposited using Ion Beam Deposition (IBD). Some process benefits include:

  • Good control of film composition
  • Smooth surface and
  • Low resistivity
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