Part of the Oxford Instruments Group


Aluminium (Al) is a nonmagnetic, ductile metal in the boron group. Al has applications in metal interconnects and is also used as a hardmask for some materials. Al and related films may be dry etched smoothly using Inductively Coupled Plasma (ICP) or deposited using Ion Beam Deposition (IBD) technology.

Process benefits

More on ICP Request more information
More on IBD Request more information

Related Products