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Part of the Oxford Instruments Group
This workshop is developed to give you an overview of Oxford Instruments solutions for Quantum and Photonic devices and 2D Materials.
Oxford Instruments experts will give an overview of next generation dilution refrigerators and Atomic Scale Processing for Quantum Devices, Photonic Device Fabrication and nanomaterial processing capabilities including CVD and Plasma Enhanced CVD (PECVD) deposition of TMDs. Our experts will share the potential of ALD and ALE techniques to solve critical problems in quantum device fabrication, we will discuss our latest customer systems and projects within the quantum ecosystem and present the latest in the technology of the perfect system for a multi-user and multi-system lab.
Quantum device losses are predominantly from surfaces and interfaces. Atomic layer deposition (ALD) enables tuneable low loss materials, such as superconducting nitrides with engineered crystallinity and in-situ isotropic atomic layer etch (ALE) capability to potentially engineer interfaces prior to deposition and modify films in-situ for superconducting quantum applications, as well as to potentially remove etch-induced interface damage in other applications, such as single photon emitters. Anisotropic ALE may reduce and remove TLS resulting from RIE-induced subsurface amorphization and etchant incorporation, which is useful for applications such as color center-based quantum devices (diamond and SiC). This talk will focus on the potential of ALD and ALE to solve critical problems in quantum device fabrication.
Oxford Instruments will present the latest in technology and applications with Oxford Instruments’ family of next generation dilution refrigerators, Proteox and some of the features that make this system perfect for a multi-user and multi-system lab. We will also discuss our latest customer systems and projects within the quantum ecosystem.
The applications for photonic integrated circuits is growing rapidly. Dr Katie Hore will talk about plasma processing of In- and Ga-based compounds for a variety of devices including lasers, photodiodes and VCSELs. It is essential to control the critical dimensions of these materials during fabrication to achieve the desired device results. She will focus on how to achieve the required profiles, excellent surface quality and low device damage. Dr Katie Hore will also talk about processing less common materials for photonics applications such as CMT and lithium niobate.
Graphene and hybrid nanomaterials such as Transition Metal Dichalcogenides (TMDs) have revealed unforeseen electrical, optical, and mechanical properties which make them unique candidates for next-generation nanotechnology devices, ranging from large scale consumer devices to quantum electronics. Traditional vapour-phase synthesis methods of bulk semiconductors have recently undergone a resurgence of research interest for the growth of low-dimensional materials and heterostructures. In particular, Chemical Vapour Deposition (CVD) has been extensively investigated to achieve materials with atomic planes of Van der Waals solids. Of special interest are heterostructures created by stacking atomic layers of different materials with complementary characteristics to achieve novel functionality.
Oxford Instruments Plasma Technology is at the forefront of successful scaled-up wafer-sized deposition of these materials. I will give an overview of our nanomaterial processing capabilities including CVD and Plasma Enhanced CVD (PECVD) deposition of TMDs such as WS2 and 2D heterostructures such as graphene and MoS2 and introduce our developments in technology for the fabrication processes of 2D materials-based devices.
Dr. Russ Renzas is the Quantum Technology Manager at Oxford Instruments, where he focuses on the use of atomic layer deposition (ALD) and etch (ALE) to reduce loss in quantum devices. Russ was director of device fabrication at Rigetti Computing from 2016-2018. Russ studied Electrical Engineering at Princeton University and earned his Ph.D. in Physical Chemistry at UC Berkeley (2010). He has co-authored over 15 peer-reviewed journal articles with over 3000 citations in fields ranging from nanoparticle catalysis to quantum computing and is a co-inventor on two quantum device fabrication patents. Russ is based in Reno, Nevada.
Harriet van der Vliet is the product segment manager for quantum technologies at Oxford Instruments NanoScience, having previously been a quantum engineer in the NPI team for over 3 years. Prior to this she received her PhD in quantum physics, specialising in current sensing noise thermometry and ultralow temperature engineering, from Royal Holloway, University of London’s Quantum Fluids and Solids group, The London Low Temperature Laboratory in 2017. Oxford Instruments NanoScience designs, supplies and supports market-leading research tools that enable quantum technologies, new materials and device development in the physical sciences. Our tools support research down to the atomic scale through creation of high performance, cryogen-free low temperature and magnetic environments, based upon our core technologies in low and ultra-low temperatures, high magnetic fields and system integration, with ever-increasing levels of experimental and measurement readiness.
Dr Katie Hore is the Commercial Solutions Team Leader for Optoelectronics, and Power and RF at Oxford Instruments Plasma Technology. As an Applications Engineer, she specialises in etching indium phosphide, gallium arsenide, and other III-V related materials. She received her DPhil in Inorganic Chemistry from the University of Oxford where she studied solid-state hydrogen storage materials. Katie also has an MRes in materials and nanotechnology from the University of Birmingham and an undergraduate chemistry degree from the University of Bristol. As well as managing the Optoelectronics, and Power and RF Applications Teams in the Applications Solutions Group, she works on developing and supporting etching processes for customer requirements and on new product introductions.
A PhD and a first-class honours science graduate who has more than 20 years of experience within an international semiconductor business environment gained through top quality, innovative work coupled with a highly motivated approach and strong interpersonal and management skills. Currently working at Oxford Instruments Plasma Technology as the Commercial Solutions Manager responsible in delivering multimillion-pound equipment for the semiconductor market. Managing a highly skilled team and a part of the senior management team contributing key business decisions including drivers for improved productivity and business growth across the whole organisation.
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