Part of the Oxford Instruments Group
PSS Etching Using Innovative Plasma Processing Technology

15 June 2015

PSS Etching Solutions with Plasma

The aggressive drive for improved Cost of Ownership within the LED industry has driven the innovation within Oxford Instruments plasma technology. Optimised plasma processing offers many ways to improve device output and reduce manufacturing costs, a double windfall.

This presentation describes the approaches taken to increase productivity in these processes, both by increasing the process rates and by increasing the number of wafers processed simultaneously.


Chinese Version
This webinar is also available in Chinese.

Meet the Presenters

Mark Dineen
Dr Mark Dineen
Technical Marketing Manager at Oxford Instruments
Dr Young Huang
Dr Young Huang
Field and Lab Applications Manager at Oxford Instruments