Part of the Oxford Instruments Group
Expand

OXFORD INSTRUMENTS PLASMA TECHNOLOGY IS A LEADING PROVIDER OF ETCH & DEPOSITION PROCESSING SOLUTIONS

REQUEST A DEMO


LAB – 
RESEARCH & DEVELOPMENT SOLUTIONS


FAB – 
VOLUME PRODUCTION SOLUTIONS


SUPPORT – 
GLOBAL CUSTOMER SERVICES


MARKETS & APPLICATIONS

Plasma technology is used in the fabrication of most semiconductor devices created today across a wide range of industries. It is able to provide unique solutions for the creation and manipulation of matter with atomic scale accuracy.

WORLD-LEADING SYSTEMS

High-performance, reliable and flexible systems across several etching & deposition technologies. Systems range from single load-lock R&D systems to full clusterable production systems for high volume manufacturing.

REQUEST MORE INFORMATION

Latest News & Events

Join The Conversation