Part of the Oxford Instruments Group

Oxford Instruments Plasma Technology is a leading provider of etch and deposition process solutions for nanometre-sized features, nanolayers, and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma, ion beam and atomic layer deposition and etch. Products range from clustered cassette-to-cassette platforms for high-throughput production processing to compact stand-alone systems for R&D.

FAB – Volume Production Solutions

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LAB – Research & Development Solutions

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