Part of the Oxford Instruments Group
Collapse

Tantalum 

Tantalum  (Ta) is a transition metal that is highly corrosion-resistant.
It is used in applications such as an X-ray mask absorber on a SiN or SiC membrane and as part of modern capacitors.
It can be etched using Inductively Coupled Plasma (ICP) and Reactive Ion Etching (RIE).

More on ICP Request more information
More on RIE Request more information

Related Products