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Silicon

Silicon (Si) is a chemical element with symbol Si and atomic number 14.
A hard and brittle crystalline solid with a blue-grey metallic lustre, it is a tetravalent metalloid and semiconductor.

  • High rate, high selectivity deep silicon etch process using alternating deposition and etch steps
  • Applicable to silicon, silicon-on-insulator (SOI) and silicon on glass
  • Wafer size: up to 2" 
  • Wafer size: up to 200mm   
Bosch deep Si etching

Deep Silicon Bosch etch

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Poly Si can use different chemistries using pure and diluted silane. High quality Poly Si over 2inch wafers.

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Si may be dry etched using HBr based selective silicon etching with the Inductively Coupled Plasma (ICP) process technique. 

Large process database on various process chemistries.
Competitive process results in a large number of applications from black Si formation to high aspect ratio features.

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  • Isotropic Si etch with high selectivity to Photoresist (PR) and Silicon Oxide (SiO2)
  • Also applicable as a MEMS release etch
  • Wafer size: up to 200mm
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  • Deep Si etching using a simple and extremely clean plasma chemistry at cryogenic temperatures
  • Vertical features with smooth sidewalls
  • Wafer size: up to 200mm
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Cryogenic Si etch

Cryogenic Si etch

Cryogenic Si etch

Cryogenic Si etch

Ultra high selectivity cryo-silicon etch

Ultra high selectivity cryo-silicon etch


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