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Copper

Copper (Cu) is used in modern semiconductor chips. Due to it's high electrical and heat conductivity it can be used to make smaller devices than ones with Aluminium interconnects for example. This means more devices for a fixed chip size and lower power requirements. 

It can be etched using Inductively Coupled Plasma (ICP) or Ion Beam Etch (IBE).

More on ICP Request more information
More on IBE Request more information

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