Part of the Oxford Instruments Group
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Process solutions for
BioMEMS Applications

BioMEMS devices have emerged as a subset of the MEMS sensor market and are enabling a new generation of detectors allowing efficient point of use diagnosis and monitoring of medical conditions. We provide plasma etching solutions which are essential in forming the structure of these new devices. 

BioMEMS Technology

Where MEMS are overwhelmingly manufactured in Si, BioMEMS also use polymers, glass and ceramics as the base material. Modification of surfaces for biomedical assays and biocompatibility has emerged as a complex science. They may be used in vivo or in vitro (either in or outside of a living body) they can be standalone devices but are usually integrated with other components to perform one or more functions, they have been referred to as “Lab on a chip”.

BioMEMS Systems